SiC wafer(substrate)


 

Silicon carbide (SiC), also known as carborundum, is a compound of silicon and carbon with chemical formula SiC.SiC is a Ⅳ-Ⅳ compound semiconductor material, with a variety Allotropic. The typical structure of which is divided into two types, first type is sphalerite crystal structure as 3C-SiC (β-SiC),second type is wurtzite hexagonal crystal structure; typically a 6H-SiC, 4H-SiC and 15R-SiC known as α-SiC. The most commonly used in the semiconductor industry are 4H-SiC and 6H-SiC structures.

There are some advantages for SiC:
–Current density can easily reach 5 or even 10 A/mm² (less than 1 A/mm² for silicon)
–Breakdown voltage (Volt/μm of epilayer) is typically in the 100 V/μm range for SiC, compared to 10 V/μm for silicon
–A single SiC device will drive higher current and voltage in a reduced foot-print.
–SiC is intrinsically very thermally conductive. Where a Silicon device will have to be cooled down to not exceed 85°C, a similar SiC device will operate at 250°C with no degradation. This robustness to higher operation temperature will allow cost savings at system or module level where the cooling features (air, water, fans, heat sinks…) will be considerably reduced and shrunk.
•Higher electron mobility of SiC also permits higher frequency operation in switching mode.

Latentek can provide high quality single crystalline Silicon carbide wafer; furthermore, we provide two forms of wafer : semi-insulating and conductive as to meet the customer needs of high-frequency components and high power components. Current technical ability is able to provide MPD<1 specifications of the wafer.

 

SiC Wafer Specification

 

4-inch Specifications of 4H-SiC High-Purity Semi-Insulating Substrate

Property Production grade Research grade Dummy grade
Diameter 100.0mm+0.0/-0.5mm
Surface Orientation {0001}±0.2°
Primary Flat Orientation <11-20>±5.0°
Secondary Flat Orientation 90.0° CW from Primary Flat ±5.0°, Si Face up
Primary Flat Length 32.5mm±2.0mm
Secondary Flat Length 18.0mm±2.0mm
Wafer Edge Chamfer
Micro Pipe Density ≦5micropipes/cm2 ≦10micropipes/cm2 ≦50micropipes/cm2
Polytype Area by High-intensity Light None 10% of Whole Area
Resistivity ≧ 1E7Ω‧cm

(Area75%)≧ 1E7Ω‧cm

Thickness 500.μm±25.μm or 350.0μm±25.μm
TTV 10μm 15μm
Bow (Absolute Value) 25μm 30μm
Warp 45μm
Surface Roughness Si-Face CMP Ra ≦0.5nm N/A
Cracks by High-intensity Light None
Edge Chips/Indents by Diffuse Lighting none Qty. ≦2,the length and width of each<1.0mm

 

4-inch Specifications of 4H-SiC N-type Substrate

Property Ultra Grade Production Grade Research Grade Dummy Grade
Diameter 100.0mm+0.0/-0.5mm
Surface Orientation Off-axis:4° toward<11-20>±0.5°
Primary Flat Orientation <11-20>±5.0°
Secondary Flat Orientation 90° CW from Primary Flat±5.0°, Si Face Up
Primary Flat Length 32.5mm±2.0mm
Secondary Flat Length 18.0mm±2.0mm
Wafer Edge Chamfer
Micropipe Density ≦1micropipe/cm2 ≦5micropipe/cm2 ≦10micropipe/cm2 ≦50micropipe/cm2
Polytype Area by High-intensity Light None 10% of Whole Area
Resistivity 0.015Ω ‧ cm~0.028Ω ‧ cm

(Area75%)0.015Ω‧cm
~0.028Ω ‧ cm

Thickness 350.m±25.m or 500.0μm±25.m
TTV 10μm 15μm
Bow(Absolute Value) 25μm 30μm
Warp 45μm
Surface Finish C Face Polished; Si Face CMP
Surface Roughness Si Face CMP Ra≦0.5nm N/A
Cracks by High-intensity Light None
Edge Chips/Indents by Diffuse Lighting None Qty≦2, the length and width of each<1.0mm

6-inch Specifications of 4H-SiC N-type Substrate

Property Standard
Diameter 150.0mm±0.25mm
Surface Orientation 4° toward<11-20>±0.5°
Primary Flat Orientation <11-20>±5.0°
Secondary Flat Orientation N/A
Primary Flat Length 47.5mm±2.0mm
Secondary Flat Length None
Wafer Edge Chamfer
Micropipe Density ≦5/cm2
Polytype Area by High-intensity Light None
Resistivity 0.015Ω ‧ cm~0.028Ω ‧ cm
Thickness 350.m±25.m
TTV 10μm
Bow(Absolute Value) ≦40μm
Warp 60μm
Surface Finish Double Face Polished;Si Face CMP
Crack by High-intensity Light None
Edge Chips/Indents by Diffuse Lighting None

 

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