Vacuum - Heat Treatment and Sintering Furnaces COV


 

COV furnaces are graphite-heated systems which are designed for heat treatment in vacuum. The design of usable space, vacuum level, and working temperature are various. As a consequence, COV furnaces can be used for numerous applications. Typical applications are sintering (including dewaxing), soldering, degassing, heat treatment, purification, CVD-coating, etc.

A COV furnace contains a double-walled vessel which is water-cooled. The vessel can be made of mild steel or stainless steel respectively, depending upon the process requirements. The general design can be horizontal or vertical. The number of controlled heating zones can be up to 8 (or even more). By adjusting the number and the arrangement of these control zones, an excellent temperature homogeneity can be achieved; however, in some cases, it can be better than ± 2°C.

COV furnaces have very low "Total Costs of Ownership“ due to high reliability, process reproducibility and a long lifetime. The system is proper for cleaning graphite materials such as MOCVD trays or hot zones, in LED, semiconductor and solar industries.

Application:

1,100 °C Heat treatment, soldering, degassing, dewaxing, chemical reduction
1,350 °C Heat treatment, soldering, degassing, dewaxing, sintering, CVD-coating
1,600 °C  Dewaxing and sintering of hard metals, crystal growth, purification, CVD-coating
1,800 °C Sintering of non-oxide ceramics
2,000 °C Pyrolyze processes, degassing and purification, sintering
2,200 °C Degassing, purification, sintering of SiC, graphitizing of composites

 

Features:

1. Maxium working temperature 2200℃
2. working space:4.5 ~ 2250 L
3. The number of controlled hot zones can be up to 8, according to requirements of customers
4. Excellent temperature homogeneity within the usable space, ±3°C
5. Vacuum range down to 1 x10-5 mbar
6. Efficient dewaxing systems for molded and extruded parts
7. Can process under flammable gases
8. Operation of the plant by PC including data logging and data storage
9. design can be horizontal or vertical

 

Design Versions:

Type: COV 1263 R
Operation temperature: 2,200 °C
Usable space (WxHxL): 1400 x 800 x 2000 mm
Usable volume: 2,240 L
power rating: 800 kVA

Type: COV 942 R
Operation temperature: 1,800 °C
Usable space (WxHxL):  Ø 1500 x 2500 mm
Usable volume: approox. 4,400L
power rating: 500 kVA

Type: COV 633 R
Operation temperature: 1,600 °C
Usable space (WxHxL): 450 x 450 x 900 mm
Usable volume: approx. 182 L
power rating: 120 kVA

Type: COV 231 R
Operation temperature: 1,600 °C
Usable space (WxHxL):  Ø 200 x 300 mm
Usable volume: approx. 9.4 L
power rating: 25 kVA

Type: COV 131 R
Operation temperature: 1,600 °C
Usable space (WxHxL): Ø 150 x 250 mm
Usable volume: about 4.4 L
power rating: 20 kVA


Type: COV 733 R
Operation temperature: 1,700 °C
Usable space (WxHxL): 1,000 x 500 x 750 m
Usable volume: approx. 375 L
filler amount: up to 600 Kg
temperature range: ± 10K

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